Stable cancellation of x-ray errors in Bayard-Alpert gauges

被引:2
|
作者
Kendall, BRF
Drubetsky, E
机构
[1] Elvac Labs, Bellefonte, PA 16823 USA
[2] Fredericks Co, Televac Div, Huntingdon Valley, PA 19006 USA
关键词
D O I
10.1116/1.581252
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
X-ray induced emission of electrons from the ion collectors of Bayard-Alpert gauges has long been recognized as a cause of falsely high readings at low pressures. Less well known is the existence of a reverse x-ray effect leading to a superimposed, but usually smaller, error signal in the opposite direction. First explained by Redhead and others in the 1960s as being caused by photoemission from the gauge envelope, this phenomenon was immediately recognized as potentially useful in cancelling the forward x-ray effect. Although promising experimental results were obtained with special gauge tubes, these early researchers concluded that the cancellation process was too unstable to be of any practical use. We report the results of an attempt to stabilize the cancellation process by the use of identical materials at the two photoemission sites. Experimental Bayard-Alpert gauge tubes were built with gold coatings on the insides of the gauge envelopes and on the surfaces of the ion collectors. The envelope coatings were operated at approximately 15-25 V below the potential of the ion collector. Stable reduction of the x-ray errors by a factor of more than 20 has been demonstrated. Short-term improvements by a factor of 100 have been achieved. Useful improvements have also been observed in sensitivity and in stability at high pressures. Results of long-term stability tests at pressures in the 10(-10) Torr range are described. (C) 1998 American Vacuum Society.
引用
收藏
页码:1163 / 1168
页数:6
相关论文
共 50 条
  • [1] Stable cancellation of x-ray errors in Bayard-Alpert gauges
    Kendall, B.R.F.
    Drubetsky, E.
    Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998, 16 (3 pt 1):
  • [2] MEASUREMENT OF X-RAY CURRENTS IN BAYARD-ALPERT TYPE GAUGES
    PEACOCK, NT
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 2674 - 2678
  • [3] SENSITIVITY OF BAYARD-ALPERT GAUGES
    REDHEAD, PA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (05): : 848 - &
  • [4] MODULATION OF BAYARD-ALPERT GAUGES
    REDHEAD, PA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (02): : 57 - &
  • [5] MODIFIED BAYARD-ALPERT GAUGE WITH X-RAY SUPPRESSION
    LEE, D
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1963, 34 (07): : 816 - &
  • [6] ION COLLECTION IN BAYARD-ALPERT GAUGES
    COMSA, G
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 117 - &
  • [7] BAYARD-ALPERT GAUGES WITH AND WITHOUT MODULATION
    GROSZKOWSKI, J
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1969, 24 (140): : 116 - +
  • [8] Innovative Bayard-Alpert gauge beats the X-ray limit
    von Freyhold, Nikolas
    Walter, Marco
    Wunderlich, Heiko
    Iwicki, Jaroslaw
    Flaemmich, Michael
    Bergner, Ute
    VAKUUM IN FORSCHUNG UND PRAXIS, 2012, 24 (05) : 12 - 16
  • [9] COMMENTS ON THE STABILITY OF BAYARD-ALPERT IONIZATION GAUGES
    TILFORD, CR
    FILIPPELLI, AR
    ABBOTT, PJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1995, 13 (02): : 485 - 487
  • [10] MODULATION CHARACTERISTICS OF SEVERAL BAYARD-ALPERT TYPE GAUGES
    LANGE, WJ
    SINGLETO.JH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1966, 3 (06): : 319 - &