The calibration of an atomic force microscope along three coordinates using a single certified dimension

被引：1
|
作者：
Rakov, A. V. [1 ]
Novikov, Yu. A. [1 ]
Todua, P. A.
机构：
[1] Russian Acad Sci, AM Prokhorov Inst Gen Phys, Moscow 117901, Russia
来源：
MEASUREMENT TECHNIQUES | 2008年 / 51卷 / 05期
关键词：
atomic force microscope; calibration;
D O I：
10.1007/s11018-008-9063-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A method of calibrating an atomic force microscope with respect to three coordinates using a single certified dimension of a test object is proposed. The method corresponds completely to the State Standards, which ensure the unity of measurements in nanotechnologies.
引用
收藏
页码：475 / 479
页数：5
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