Modification of surface morphology and lattice order in nanocrystalline ZnO thin films prepared by spin-coating sol-gel method

被引:4
|
作者
Gegova-Dzhurkova, R. [1 ]
Nesheva, D. [1 ]
Dzhurkov, V. [1 ]
Scepanovic, M. [2 ]
Grujic-Brojcin, M. [2 ]
Bineva, I. [1 ]
Mihailov, V. [1 ]
Levi, Z. [1 ]
Manolov, E. [1 ]
Popovic, Z. V. [2 ]
机构
[1] Bulgarian Acad Sci, G Nadjakov Inst Solid State Phys, 72 Tzarigradsko Chaussee Blvd, Sofia 1784, Bulgaria
[2] Univ Belgrade, Inst Phys, Ctr Solid State Phys & New Mat, Pregrev 118, Belgrade 11080, Serbia
关键词
Sol-gel; Drying; ZnO nanostructured layers; Laser irradiation; Surface morphology; Lattice strain; ZINC-OXIDE FILMS; OPTICAL-PROPERTIES; AMORPHOUS-SILICON; DEFECTS; STRAIN;
D O I
10.1007/s10971-021-05635-6
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The surface morphology and structure of zinc oxide thin films play a key role in many applications such as chemical sensors and photocatalysts. In this study, ZnO thin films are prepared on Si/SiO2 substrates by spin-coating sol-gel technique. New element in the films preparation is the application of drying with hot air flow (T-h= 90-95 degrees C), as first step of the drying procedure, followed by furnace drying as second step. It is shown that hot air drying has significant influence on the films properties. It reduces the internal stress, strongly affects the films surface morphology, gives assistance to the effusion of organic remains and results in a better crystallinity and lower defect density in the as-prepared films when compared with the films prepared by furnace drying only. Besides, first data on the modification of sol-gel ZnO films by post-deposition irradiation with a nanosecond infrared laser are obtained, giving an alternative to the standard furnace annealing. They indicate that laser irradiation of as-prepared ZnO films gives rise to certain improvement in crystal structure and slight increase in crystallite size, followed by the increase of micro-strain. It also reduces the number of defects playing role of non-radiative recombination centers, as well as the size and density of small cracks and pores on the surface of as-prepared films. Left: X-ray diffraction patterns of as-prepared and annealed at 400 degrees C ZnO films prepared by furnace drying only, the patterns are taken on non-irradiated and laser-irradiated films.
引用
收藏
页码:55 / 67
页数:13
相关论文
共 50 条
  • [1] Modification of surface morphology and lattice order in nanocrystalline ZnO thin films prepared by spin-coating sol–gel method
    R. Gegova-Dzhurkova
    D. Nesheva
    V. Dzhurkov
    M. Šćepanović
    M. Grujić-Brojčin
    I. Bineva
    V. Mihailov
    Z. Levi
    E. Manolov
    Z. V. Popović
    [J]. Journal of Sol-Gel Science and Technology, 2021, 100 : 55 - 67
  • [2] Nanostructured ZnO thin films prepared by sol-gel spin-coating
    Heredia, E.
    Bojorge, C.
    Casanova, J.
    Canepa, H.
    Craievich, A.
    Kellermann, G.
    [J]. APPLIED SURFACE SCIENCE, 2014, 317 : 19 - 25
  • [3] Structural properties of ZnO: In thin films prepared by sol-gel spin-coating technique
    Lan, W
    Liu, XQ
    Huang, CM
    Tang, GM
    Yang, Y
    Wang, YY
    [J]. ACTA PHYSICA SINICA, 2006, 55 (02) : 748 - 752
  • [4] Influences of processing parameters on the properties of ZnO thin films prepared by sol-gel spin-coating
    Song, YL
    Ji, ZG
    Liu, K
    Wang, C
    Xiang, Y
    Ye, ZZ
    [J]. ACTA PHYSICA SINICA, 2004, 53 (02) : 636 - 639
  • [5] Synthesis and Characterization of Ni-Doped ZnO Thin Films Prepared by Sol-Gel Spin-Coating Method
    Ayachi, M.
    Ayad, F.
    Djelloul, A.
    Benharrat, L.
    Anas, S.
    [J]. SEMICONDUCTORS, 2021, 55 (05) : 482 - 490
  • [6] Nanocrystalline CdS thin films prepared by sol-gel spin coating
    Thambidurai, M.
    Muthukumarasamy, N.
    Velauthapillai, Dhayalan
    Murugan, N.
    Agilan, S.
    Vasantha, S.
    Balasundaraprabhu, R.
    [J]. INTERNATIONAL JOURNAL OF MATERIALS RESEARCH, 2011, 102 (05) : 584 - 586
  • [7] Ultraviolet Photoresponse Properties of Li-Doped ZnO Thin Films Prepared by Sol-Gel Spin-Coating Method
    Lee, Wookbin
    Leem, Jae-Young
    [J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2017, 17 (08) : 5697 - 5700
  • [8] Influence of pH on ZnO nanocrystalline thin films prepared by sol-gel dip coating method
    Sivakumar, K.
    Kumar, V. Senthil
    Muthukumarasamy, N.
    Thambidurai, M.
    Senthil, T. S.
    [J]. BULLETIN OF MATERIALS SCIENCE, 2012, 35 (03) : 327 - 331
  • [9] Zinc oxide films prepared by sol-gel spin-coating
    Natsume, Y
    Sakata, H
    [J]. THIN SOLID FILMS, 2000, 372 (1-2) : 30 - 36
  • [10] Effect of different sol concentrations on the properties of nanocrystalline ZnO thin films grown on FTO substrates by sol-gel spin-coating
    Kim, Ikhyun
    Kim, Younggyu
    Nam, Giwoong
    Kim, Dongwan
    Park, Minju
    Kim, Haeun
    Lee, Wookbin
    Leem, Jae-Young
    Kim, Jong Su
    Kim, Jin Soo
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2014, 65 (04) : 480 - 486