Sub-wavelength cladding mid-infrared devices

被引:0
|
作者
Penades, Jordi Soler [1 ]
Nedeljkovic, Milos [1 ]
Khokhar, Ali. Z. [1 ]
Mashanovich, Goran Z. [1 ]
Ortega-Monux, Alejandro [2 ]
Wanguermert-Perez, Gonzalo [2 ]
Halir, Robert [2 ]
Molina-Fernandez, Inigo [2 ]
Cheben, Pavel [3 ]
机构
[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England
[2] Univ Malaga, Dept Ingn Comunicac, E-29071 Malaga, Spain
[3] Natl Res Council Canada, Ottawa, ON K1A 0R6, Canada
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中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Suspended structures enable low loss propagation in silicon waveguides for mid-infrared wavelengths by removing the lossy buried oxide (BOX) layer. We previously demonstrated suspended waveguides with a silicon core and a sub-wavelength grating (SWG) lateral cladding, which allows access to the buried oxide layer for under-etching with hydrofluoric acid. Here we show that bends, multimode interference couplers (MMI) and Mach-Zehnder interferometers (MZI) can be successfully implemented in this platform. Specifically, we report waveguides with propagation losses of 1.2 dB/cm, 90 degrees bends with 0.03 dB/bend loss, compact MMI couplers with imbalances of 0.5 dB, and MZI structures with extinction ratios in excess of 24 dB.
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收藏
页码:183 / 184
页数:2
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