Spectroscopic multi-layer film thickness measurement system

被引：3
|
作者：
Horie, M [1 ]
Fujiwara, N [1 ]
Kokubo, M [1 ]
Kakiuchida, H [1 ]
机构：
[1] DAINIPPON SCREEN MFG CO LTD,RES LAB,KAMIKYO KU,KYOTO 602,JAPAN
来源：
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY X | 1996年 / 2725卷
关键词：
D O I：
10.1117/12.240125
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：757 / 764
页数：8
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