Microsystems for the automotive industry

Sensors are enabling components for the functionality of an ever increasing number of electronic systems in the car. These systems help to improve fuel efficiency and to reduce emissions. Electronic systems also increase the safety and comfort of the driver. During the past decade microsystem technologies have greatly contributed to reduce the cost of these sensors - and thus overall system cost - while at the same time increasing their functionality and reliability. This article describes examples of microsensors that have been successfully introduced to the market such as pressure sensors, mass flow sensors, acceleration and angular rate sensor. Finally an outlook on future trends will be given.