Initial Test Results from a 3-axis Vibrating Ring Gyroscope

There are several application areas where the simultaneous measurement of rates of rotation about three mutually orthogonal axes is required. In this paper the principle features of a 3-axis vibrating ring gyroscope are described. The fabrication process for the gyroscope is presented and employs standard MEMS techniques. The modal properties for the ring are measured experimentally using laser vibrometry and electrostatic sensing and compared with the design predictions. In operation as a rate gyroscope it is necessary to excite the primary motion of the gyroscope and control is amplitude. As Q-factors of vibratory gyroscope are typically of the order 10(3)-10(4) slight variations in environmental conditions will perturb the natural frequency of the primary mode significantly. To ensure the primary motion of the gyroscope is maintained with constant amplitude a control scheme employing both frequency tracking and amplitude control is required. An electronic control system using digital signal processing (DSP) has been developed to ensure excitation of the primary motion occurs at resonance with controlled amplitude. The control scheme employs an embedded processor to generate the drive frequency (via a D/A converter) and to monitor the primary vibration (via an A/D converter). Experimental results from the control scheme highlighting its effectiveness over conventional PLL approaches are presented.