Copper electrodeposition and dissolution on tetrahedral amorphous carbon incorporating nitrogen

被引:24
|
作者
Yoo, K [1 ]
Miller, B
Shi, X
Kalish, R
机构
[1] Case Western Reserve Univ, Dept Chem, Cleveland, OH 44106 USA
[2] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
[3] Technion Israel Inst Technol, Inst Solid State, IL-32000 Haifa, Israel
[4] Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, Israel
关键词
D O I
10.1149/1.1341237
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Metal deposition and dissolution on diamond and diamond-like materials have different characteristics than on metallic electrodes and typical graphitic carbons. The behavior of copper on the recently developed tetrahedral amorphous carbon incorporating nitrogen (taC:N) film materials is addressed with quantitative speciation and voltammetry through rotating ring-disk electrode techniques. The nearly atomically smooth and widely stable taC:N film on polished Si wafers shows high nucleation overpotentials for copper deposition followed by anodic dissolution requiring participation of both the stable Cu(I) and Cu(II) states present in chloride media. The adhesion of copper films plated from conventional sulfate baths is strongly dependent on transport conditions. The anodic characteristics of the deposits reflect both the difficult nucleation process and the relative inertness of the taC:N interface. (C) 2001 The Electrochemical Society. All rights reserved.
引用
收藏
页码:C95 / C101
页数:7
相关论文
共 50 条
  • [1] Electrodeposition and nucleation of copper at nitrogen-incorporated tetrahedral amorphous carbon electrodes in basic ambient temperature chloroaluminate melts
    Lee, JJ
    Miller, B
    Shi, X
    Kalish, R
    Wheeler, KA
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2001, 148 (03) : C183 - C190
  • [2] Nitrogen incorporation into tetrahedral hydrogenated amorphous carbon
    Rodil, SE
    Morrison, NA
    Robertson, J
    Milne, WI
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1999, 174 (01): : 25 - 37
  • [3] NITROGEN DOPING OF TETRAHEDRAL AMORPHOUS-CARBON
    ROBERTSON, J
    DAVIS, CA
    [J]. DIAMOND AND RELATED MATERIALS, 1995, 4 (04) : 441 - 444
  • [4] NITROGEN DOPING OF HIGHLY TETRAHEDRAL AMORPHOUS-CARBON
    VEERASAMY, VS
    YUAN, J
    AMARATUNGA, GAJ
    MILNE, WI
    GILKES, KWR
    WEILER, M
    BROWN, LM
    [J]. PHYSICAL REVIEW B, 1993, 48 (24): : 17954 - 17959
  • [5] SUBSTITUTIONAL NITROGEN DOPING OF TETRAHEDRAL AMORPHOUS-CARBON
    DAVIS, CA
    MCKENZIE, DR
    YIN, Y
    KRAVTCHINSKAIA, E
    AMARATUNGA, GAJ
    VERASAMY, VS
    [J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1994, 69 (06): : 1133 - 1140
  • [6] Electrodeposition and dissolution of copper
    Alkire, R
    [J]. PROCEEDINGS OF THE SYMPOSIUM ON FUNDAMENTAL ASPECTS OF ELECTROCHEMICAL DEPOSITION AND DISSOLUTION INCLUDING MODELING, 1998, 97 (27): : 3 - 10
  • [7] Study of the conductivity of nitrogen doped tetrahedral amorphous carbon films
    Liu, Shu
    Wang, Guangfu
    Wang, Zhenghao
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 2007, 353 (29) : 2796 - 2798
  • [8] Electrical properties of nitrogen incorporated tetrahedral amorphous carbon films
    Chen, ZY
    Yu, YH
    Zhao, JP
    Yang, SQ
    Shi, TS
    Liu, XH
    Luo, EZ
    Xu, JB
    Wilson, IH
    [J]. THIN SOLID FILMS, 1999, 339 (1-2) : 74 - 77
  • [9] First principles studies of nitrogen doped tetrahedral amorphous carbon
    Gao Wei
    Gong Shui-Li
    Zhu Jia-Qi
    Ma Guo-Jia
    [J]. ACTA PHYSICA SINICA, 2011, 60 (02)
  • [10] Photoconductivity of nitrogen-modified hydrogenated tetrahedral amorphous carbon
    Ilie, A
    Harel, O
    Conway, NMJ
    Yagi, T
    Robertson, J
    Milne, WI
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 87 (02) : 789 - 794