A SINGLE-CELL IMPEDANCE FLOW CYTOMETRY MICROSYSTEM BASED ON 3D SILICON MICROELECTRODES

This is the first account of a single-cell impedance flow cytometry microsystem based on 3D silicon microelectrodes. Such microelectrodes emerge being readily aligned during lithographic patterning of silicon and thus relieve the burden of alignment that comes with planar microelectrodes and their opposing arrangement for a maximum sensitivity. The opposing arrangement of the microelectrodes generate homogeneous electric field and thus maintain maximum sensitivity while individual cells passing by. The microsystem has been showcased here for the flow impedance measurement of polystyrene microspheres and cells at 10 Mil-lz. Successful classification of human colorectal cancer cells and red blood cells has also been demonstrated using this device.