Bulk defect induced low-frequency noise in n+-p silicon diodes

被引:19
|
作者
Hou, FC [1 ]
Bosman, G
Simoen, E
Vanhellemont, J
Claeys, C
机构
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
[2] IMEC, B-3001 Louvain, Belgium
关键词
charge carrier processes; diodes; semiconductor device noise; trapping noise;
D O I
10.1109/16.735731
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The low-frequency 1/f-like noise of gated n(+)-p silicon diodes has been measured and analyzed in terms of trapping and detrapping of holes in defect centers located in the bulk section of the space charge region at 0.43 eV below the conduction band. Both the trap characteristics and their precise physical location are resolved from the noise measurements showing that the noise producing defect region moves closer to the metallurgical junction when forward bias is increased. The noise measurements independently confirm that thermal substrate pretreatments lower the defect density in the diodes fabricated in Czochralski (CZ) grown substrates, The defect centers are assumed to be associated with precipitated oxygen/dislocation complexes.
引用
收藏
页码:2528 / 2536
页数:9
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