Self-calibration interferometric stitching test method for cylindrical surfaces

被引：3
|
作者：
Hu, Hao [1 ,2 ,3 ]
Sun, Zizhou [1 ,2 ,3 ]
Xue, Shuai [1 ,2 ,3 ,4 ]
Guan, Chaoliang [1 ,2 ,3 ]
Dai, Yifan [1 ,2 ,3 ]
Liu, Junfeng [1 ,2 ,3 ]
Peng, Xiaoqiang [1 ,2 ,3 ]
Chen, Shanyong [1 ,2 ,3 ]
Liu, Yong [1 ,2 ,3 ]
机构：
[1] Natl Univ Def Technol, Coll Intelligent Sci, Changsha 410073, Hunan, Peoples R China
[2] Hunan Key Lab Ultra Precis Machining Technol, Changsha 410073, Hunan, Peoples R China
[3] Natl Univ Def Technol, Lab Sci & Technol Integrated Logist Support, Changsha 410073, Hunan, Peoples R China
[4] Cent South Univ, State Key High Performance Complex Mfg, Changsha 410073, Hunan, Peoples R China
来源：
OPTICS EXPRESS | 2022年 / 30卷 / 21期
基金：
中国国家自然科学基金;
关键词：
WAVE-FRONT; INTERFEROGRAMS; METROLOGY; RECONSTRUCTION; MISALIGNMENT;
D O I：
10.1364/OE.473836
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The surface figure accuracy requirement of cylindrical surfaces widely used in rotors of gyroscope, spindles of ultra-precision machine tools and high-energy laser systems is nearly 0.1 mu m. Cylindricity measuring instrument that obtains 1-D profile result cannot be utilized for deterministic figuring methods. Interferometric stitching test for cylindrical surfaces utilizes a CGH of which the system error will accumulated to unacceptable extent for large aperture/angular aperture that require many subapertures. To this end, a self-calibration interferometric stitching method for cylindrical surfaces is proposed. The mathematical model of cylindrical surface figure and the completeness condition of self-calibration stitching test of cylindrical surfaces were analyzed theoretically. The effects of shear/stitching motion error and the subapertures lattice on the self-calibration test results were analyzed. Further, a self-calibration interferometric stitching algorithm that can theoretically recover all the necessary components of the system error for testing cylindrical surfaces was proposed. Simulations and experiments on a shaft were conducted to validate the feasibility.(c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码：39188 / 39206
页数：19
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