Magnetochemical peculiarities of manufacturing magnetoresistive sensors in integral microcircuits

被引:1
|
作者
Netsvetov, V. I. [1 ]
Medvedev, Yu. V. [1 ]
Shchigolev, V. V. [1 ]
Kosse, A. I. [1 ]
Khizhenkov, P. K. [1 ]
机构
[1] Natl Acad Sci Ukraine, AA Galkin Donetsk Phys Tech Inst, UA-83114 Donetsk, Ukraine
来源
关键词
Apply Electrochemistry; Surface Engineer; Residual Magnetization; Soft Magnetic Material; Etching Agent;
D O I
10.3103/S1068375510050145
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
[No abstract available]
引用
收藏
页码:494 / 496
页数:3
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