Integrated interferometer for monitoring three-dimensional vibrations by discrete aperture

被引：0

作者：

Zhang, Xuejie ^{[1
]}

Huang, Wei ^{[1
]}

Liu, Dean ^{[1
]}

Feng, Tao ^{[1
]}

Zhang, Yan ^{[1
]}

Sun, Pingping ^{[1
]}

Zhu, Jianqiang ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

来源：

OPTICS AND LASER TECHNOLOGY | 2012年 / 44卷 / 05期

关键词：

Vibration measurement; Interferometer; Three-dimension; HIGH-SPEED; HETERODYNE; NONLINEARITY;

D O I：

10.1016/j.optlastec.2011.12.027

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper presents a new method for measuring vibration based on interference from two spherical waves. By integrating the two interference arms into a beamsplitter cube by reflective film and dividing the probe beam into two parts with discrete apertures, the interferometer can distinguish that the vibrations are from the monitored optical components or from laser interferometer system itself. At the same time, because the two interference waves are spherical, it can realize monitoring the three-dimensional vibrations. The measurement system has advantages of being stable and reliable with an integrated structure. Theoretical analysis and experimental demonstration are performed. The experiment results indicate that the method can monitor three-dimensional vibrations accurately. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：1393 / 1397

页数：5

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