Wireless magnetic micromachine of planar structure with magnetic thin film

Magnetic micromachines are driven by a magnetic field. They require no power supply cables, no batteries, and no controlling systems on the body of the machine. The magnetic micromachine of planar structure was fabricated with magnetic thin film. The size of this micromachine is 30 x 60 x 12 mu m. The micromachine swam at the rotational frequency of 1-10 Hz in the water with a kinematic viscosity of 1 mm(2)/s and a Reynolds number of 0.1-1. The magnetic torque required for rotating the micromachine was very small, and it was clarified that the value could be realized with a magnetic thin film.