Suspended four-dimensional motor-driven adjusting mount structure with high resolution

Optical components require multi-dimensional adjustment when being accurately detecting its surface shape. The most of existing adjusting mounts are hand regulation that their efficiency and resolution are lower. Against this situation, a motor-driven four-dimensional adjusting mount which is high resolution and stability is designed. An experiment against the whole structure and the static analysis of key component were carried out. Analysis and experimental results show that the the four-dimensional adjustment mounts can realize the translation adjustment in X, Y direction and the angular adjustment in theta(x) theta(y) direction. The angular displacement resolution is 0.1 '' and linear displacement adjustment resolution is 0.1 mu m when the load is 37 kg.