Investigation of the Carbon Monoxide Gas Sensing Characteristics of Tin Oxide Mixed Cerium Oxide Thin Films

被引：52
|
作者：
Durrani, Sardar M. A. [1 ]
Al-Kuhaili, Mohammad F. [1 ]
Bakhtiari, Imran A. [1 ]
Haider, Muhammad B. [1 ]
机构：
[1] King Fahd Univ Petr & Minerals, Dept Phys, Dhahran 31261, Saudi Arabia
来源：
SENSORS | 2012年 / 12卷 / 03期
关键词：
thin film; AFM; XPS; CeO2; SnO2; CO sensor; semiconductor gas sensor; SENSITIVITY; CO; SENSOR; OXYGEN; DEPENDENCE; DEPOSITION; XPS;
D O I：
10.3390/s120302598
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Thin films of tin oxide mixed cerium oxide were grown on unheated substrates by physical vapor deposition. The films were annealed in air at 500 degrees C for two hours, and were characterized using X-ray photoelectron spectroscopy, atomic force microscopy and optical spectrophotometry. X-ray photoelectron spectroscopy and atomic force microscopy results reveal that the films were highly porous and porosity of our films was found to be in the range of 11.6-21.7%. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. We found that 430 degrees C was the optimum operating temperature for sensing CO gas at concentrations as low as 5 ppm. Our sensors exhibited fast response and recovery times of 26 s and 30 s, respectively.
引用
收藏
页码：2598 / 2609
页数：12
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