Optical microscope imaging of semiconductor quantum wells

被引:5
|
作者
Kim, H
Kim, J
Jeon, H [1 ]
机构
[1] Seoul Natl Univ, Sch Phys, Seoul 151747, South Korea
[2] Seoul Natl Univ, Interuniv Semicond Res Ctr, Seoul 151747, South Korea
关键词
D O I
10.1088/0268-1242/16/5/102
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The diffusion-limited wet-etching technique is used to produce a vertical taper through an InGaAs/GaAs multiple-quantum-well (QW) heterostructure. The lateral extension of a QW layer becomes as large as a few micrometres upon being truncated at an angle below 0.1 degrees, resulting in an effective magnification factor greater than 500. This allows not just imaging of QWs but also quantitative measurements of individual QW thickness using an ordinary optical microscope. Also presented are cathodoluminescence data for the taper-etched sample, confirming that the lines appearing in the optical microscope image are indeed QWs.
引用
收藏
页码:L24 / L27
页数:4
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