Design and Analysis of a Novel Electro-Optical MEMS Gyroscope for Navigation Applications

被引：2

作者：

Waters, Richard ^{[1
]}

Tally, Charles ^{[1
]}

Dick, Brian ^{[1
]}

Jazo, Hugo ^{[1
]}

Fralick, Mark ^{[1
]}

Kerber, Maxwell ^{[1
]}

Wang, Andrew ^{[1
]}

机构：

[1] Space & Naval Warfare Syst Ctr Pacific SSC Pacifi, Adv Circuits & Sensors Branch, San Diego, CA USA

来源：

2010 IEEE SENSORS | 2010年

关键词：

D O I：

10.1109/ICSENS.2010.5689922

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel gyroscope design is presented that has potential to reach navigation-grade performance, i.e. bias instability < 0.01 degrees/hr and Angle Random Walk (ARW) < 0.001 degrees/root hr. The design is based on the incorporation of an optical transduction mechanism used to decouple drive and sense signals, a dual crystalline silicon spring fabrication approach along with a large drive mass and small sense mass to enhance Coriolis displacement.

引用

页码：1690 / 1695

页数：6

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