By the use of aniline and the sterically hindered aromatic primary amines, 2,6-Me2C6H3NH2 and 2,6-iPr(2)C(6)H(3)NH(2), N-bonded monochlorosilanes, ArN(SiMe3)SiMe2Cl [At = C6H5 (1a), Ar = 2,6-Me2C6H3 (1b) and Ar = 2,6-iPr(2)C(6)H(3) (1c)] have been prepared by a sequential deprotonation at the nitrogen followed by reaction with silyl chlorides. Hydrolysis of the N-bonded monochlorosilanes afforded the N-bonded monosilanols ArN(SiMe3)SiMe2OH [Ar = C6H5 (2a), Ar = 2,6-Me2C6H3 (2b) and Ar = 2,6-iPr(2)C(6)H(3) (2c)]. The X-ray crystal structure of 1c reveals a positional disorder of the Cl and CH3 substituents on silicon. The X-ray crystal structure of 2c shows that it is involved in an intermolecular O-(HO)-O-... hydrogen bonding in the solid state to afford a dimeric structure containing the O2H2 ring. ((c) Wiley-VCH Verlag GmbH & Co. KGaA, 69451 Weinheim, Germany, 2005)