Effect of laser energy on the properties of neodymium-doped indium zinc oxide thin films deposited by pulsed laser deposition

被引：4
|
作者：
Fu, Xiao [1 ]
Yao, Rihui [1 ]
Liang, Zhihao [1 ]
Luo, Dongxiang [2 ,3 ]
Xu, Zhuohui [4 ]
Li, Yilin [1 ]
Chen, Nanhong [1 ]
Hu, Chunyuan [5 ]
Ning, Honglong [1 ]
Peng, Junbiao [1 ]
机构：
[1] South China Univ Technol, Inst Polymer Optoelect Mat & Devices, State Key Lab Luminescent Mat & Devices, Guangzhou 510640, Peoples R China
[2] South China Normal Univ, Inst Semicond, Guangzhou 510631, Peoples R China
[3] Guangdong Univ Technol, Sch Mat & Energy, Guangzhou 510006, Peoples R China
[4] Yulin Normal Univ, Guangxi Key Lab Agr Resources Chem & Biotechnol, Yulin 537000, Peoples R China
[5] State Key Lab Adv Mat & Elect Components, Fenghua Elect Ind Pk, 18 Fenghua Rd, Zhaoqing 526020, Peoples R China
来源：
SUPERLATTICES AND MICROSTRUCTURES | 2021年 / 160卷
基金：
中国国家自然科学基金;
关键词：
Laser energy; Pulsed laser deposition; Neodymium-doped indium-zinc-oxide; OPTICAL-PROPERTIES; SEMICONDUCTORS; ND;
D O I：
10.1016/j.spmi.2021.107059
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The neodymium (Nd) doped indium-zinc-oxide (NIZO) is a material with high mobility and great potential in transparent electronic devices. NIZO thin films were prepared by pulsed laser deposition (PLD) at 250, 350, 450, and 550 mJ/pulse laser energy, respectively. With the increase of laser energy, the films gradually change from an amorphous to an amorphous/crystalline state and the In2O3 crystals have preferential growth in the (123) plane. The average transmittance of the film is higher than 80% in the visible range. When the laser energy is 250 mJ, the carrier mobility has the highest value of 14.43 cm(2) V-1 s(-1), and it decreases with the increase of laser energy. The possible reason for this phenomenon is given by electronic structure and crystallization. Based on the content of defect states and the emitted particle number, the carrier concentration of the films is analyzed.
引用
收藏
页数：8
相关论文
共 50 条
  • [1] Effect of laser irradiation on the properties of indium tin oxide films deposited by pulsed laser deposition
    Adurodija, FO
    Izumi, H
    Ishihara, T
    Yoshioka, H
    Motoyama, M
    Murai, K
    [J]. APPLIED SURFACE SCIENCE, 2001, 177 (1-2) : 114 - 121
  • [2] Structural and optical properties of neodymium-doped lutetium fluoride thin films grown by pulsed laser deposition
    Ieda, Mirai
    Ishimaru, Tatsuya
    Ono, Shingo
    Yamanoi, Kohei
    Cadatal-Raduban, Marilou
    Shimizu, Toshihiko
    Sarukura, Nobuhiko
    Yokota, Yuui
    Yanagida, Takayuki
    Yoshikawa, Akira
    [J]. OPTICAL MATERIALS, 2013, 35 (12) : 2329 - 2331
  • [3] Structural and optical properties of Cd and Mg doped zinc oxide thin films deposited by pulsed laser deposition
    Devi, Vanita
    Joshi, B. C.
    Kumar, Manish
    Choudhary, R. J.
    [J]. INTERNATIONAL CONFERENCE ON RECENT TRENDS IN PHYSICS (ICRTP 2014), 2014, 534
  • [4] Optical properties of amorphous indium zinc oxide thin films synthesized by pulsed laser deposition
    Craciun, V.
    Martin, C.
    Socol, G.
    Tanner, D.
    Swart, H. C.
    Becherescu, N.
    Craciun, D.
    [J]. APPLIED SURFACE SCIENCE, 2014, 306 : 52 - 55
  • [5] Effect of laser irradiation on the properties of indium tin oxide films deposited at room temperature by pulsed laser deposition
    Adurodija, FO
    Izumi, H
    Ishihara, T
    Yoshioka, H
    Motoyama, M
    Murai, K
    [J]. VACUUM, 2002, 67 (02) : 209 - 216
  • [6] Effect of Laser Power on Photoluminescence and Transmittance Properties of Pulsed Laser Deposited Zinc Oxide Thin Films
    Mallick, Arindam
    Basak, Durga
    [J]. PROCEEDINGS OF THE 59TH DAE SOLID STATE PHYSICS SYMPOSIUM 2014 (SOLID STATE PHYSICS), 2015, 1665
  • [7] Samarium doped cerium oxide thin films deposited by pulsed laser deposition
    Pascu, Rovena Veronica
    Epurescu, George
    Boerasu, Iulian
    Niculescu, Ana -Maria Banici
    Manica, Dumitru
    Trefilov, Alexandra Maria Isabel
    Sava, Bogdan Alexandru
    [J]. APPLIED SURFACE SCIENCE, 2022, 606
  • [8] Dielectric properties of pulsed-laser deposited indium tin oxide thin films
    Giusti, G.
    Bowen, J.
    Ramasse, Q.
    Rey, G.
    Blackburn, E.
    Tian, L.
    Jones, I. P.
    Abell, J. S.
    [J]. THIN SOLID FILMS, 2012, 524 : 249 - 256
  • [9] Laser energy density, structure and properties of pulsed-laser deposited zinc oxide films
    Tsoutsouva, M. G.
    Panagopoulos, C. N.
    Kompitsas, M.
    [J]. APPLIED SURFACE SCIENCE, 2011, 257 (14) : 6314 - 6319
  • [10] Optical and photoluminescent properties of Al-doped zinc oxide thin films by pulsed laser deposition
    Liu, Yaodong
    Li, Qiang
    Shao, Huiliang
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 485 (1-2) : 529 - 531
12345