Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering

被引：207
|
作者：
Minami, T [1 ]
Miyata, T [1 ]
Yamamoto, T [1 ]
机构：
[1] Kanazawa Inst Technol, Elect Device Syst Lab, Nonoichi, Ishikawa 921, Japan
来源：
SURFACE & COATINGS TECHNOLOGY | 1998年 / 108卷 / 1-3期
关键词：
work function; transparent conducting oxide film; metal oxide; transparent electrode; magnetron sputtering;
D O I：
10.1016/S0257-8972(98)00592-1
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The work function of transparent conducting multicomponent oxide (TCO) films is reported. TCO films consisting of binary oxides, such as In2O3, SnO2 and ZnO, and ternary oxides, such as Zn2In2O5, In4Sn3O12, GaInO3, ZnSnO3 and MgIn2O4, were prepared by magnetron sputtering. In addition, transparent conducting films consisting of multicomponent oxides composed of combinations of these binary or ternary oxides were also prepared by magnetron sputtering. The work function of these TCO films was measured by ultraviolet photoelectron spectroscopy operated in air. It was found that the work function as well as the electrical, optical and chemical properties of transparent conducting multicomponent oxide films could be controlled by varying the chemical composition. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：583 / 587
页数：5
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