Self-mixing interferometer based on sinusoidal phase modulating technique

被引：81
|
作者：
Guo, DM [1 ]
Wang, M [1 ]
Tan, SQ [1 ]
机构：
[1] Nanjing Normal Univ, Dept Phys, Nanjing 210097, Peoples R China
来源：
OPTICS EXPRESS | 2005年 / 13卷 / 05期
关键词：
D O I：
10.1364/OPEX.13.001537
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A new self-mixing interferometry based on sinusoidal phase modulating technique is presented. Self-mixing interference occurs in the laser cavity by reflecting the light from a mirror-like target in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic modulator (EOM) in the external cavity. The phase of the interference signal is calculated by Fourier analysis method. The interferometer is applied to measure the displacement of a high-precision commercial PZT with an accuracy of < 10nm. The measurement range of the system mainly depends on the maximum operating frequency of EOM and the maximum sampling rate of A/D converter. (C) 2005 Optical Society of America.
引用
收藏
页码：1537 / 1543
页数：7
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