Fast high-precision distance measurements on scattering technical surfaces using frequency combs

被引：0

作者：

Weimann, C. ^{[1
]}

Meier, D. ^{[1
]}

Wolf, S. ^{[1
]}

Schleitzer, Y. ^{[3
]}

Totzeck, M. ^{[3
]}

Heinrich, A. ^{[3
]}

Hoeller, F. ^{[3
]}

Leuthold, J. ^{[1
,2
]}

Freude, W. ^{[1
,2
]}

Koos, C. ^{[1
,2
]}

机构：

[1] Karlsruhe Inst Technol, Inst Photon & Quantum Elect IPQ, D-76021 Karlsruhe, Germany

[2] Karlsruhe Inst Technol, Inst Microstruct Technol, D-76021 Karlsruhe, Germany

[3] Carl Zeiss, Oberkochen, Germany

来源：

2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2013年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using modulator-generated optical frequency combs we measure the distance to scattering technical surfaces. We achieve measurement errors below 10 mu m, a dynamic range of over 37 dB and an acquisition time of 8.3 mu s.

引用

页数：2

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