ON ELECTRON HEATING IN MAGNETRON SPUTTERING DISCHARGES

被引：0
|
作者：
Gudmundsson, J. T. [1 ,2 ]
Lundin, D. [3 ]
Raadu, M. A. [1 ]
Huo, C. [1 ]
Minea, T. M. [3 ]
Brenning, N. [1 ,4 ]
机构：
[1] KTH Royal Inst Technol, Dept Space & Plasma Phys, SE-10044 Stockholm, Sweden
[2] Univ Iceland, Inst Sci, Dunhaga 3, IS-107 Reykjavik, Iceland
[3] Univ Paris Saclay, Univ Paris Sud, LPGP, CNRS,UMR 8578, F-91405 Orsay, France
[4] Linkoping Univ, Plasma & Coatings Phys Div, IFM Mat Phys, SE-58183 Linkoping, Sweden
来源：
2017 IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS) | 2017年
关键词：
D O I：
暂无
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
WE 1.4-1
引用
收藏
页数：1
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