The fabrication of the AlGaInP MQW circular ring resonator semiconductor laser

被引：0
|
作者：
Shih, M. C. [1 ]
Wang, S. C. [1 ]
Ho, C. E.
机构：
[1] Natl Kaohsiung Univ, Dept Elect Engn, Kaohsiung, Taiwan
来源：
EDSSC: 2007 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS, VOLS 1 AND 2, PROCEEDINGS | 2007年
关键词：
semiconductor lasers; circular ring lasers; UV laser etching;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Fabrication of an AlGaInP multiple quantum well semiconductor with a circular ridge waveguide ring resonator of 100 um diameter and 10 um width by using a novel UV laser-assisted cryo-etching technique is presented. It shows single-modes output at the threshold current density 82.5 A/cm(2) and 10 KHz pulse mode operation. The ring laser provides a promising photonic device for opto-electronic system integration applications.
引用
收藏
页码：213 / +
页数：2
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