A monolithic 3D fully-differential CMOS accelerometer

被引：0

作者：

Tsai, Ming-Han ^{[1
]}

Sun, Chih-Ming ^{[1
]}

Wang, Chuanwei ^{[2
]}

Lu, Jrhoung ^{[3
]}

Fang, Weileun ^{[1
,2
]}

机构：

[1] Natl Tsing Hua Univ, Nano Engn & Microsyst Inst, Hsinchu, Taiwan

[2] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

[3] PixArt Imaging Inc, Hsinchu, Taiwan

来源：

2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2008年

关键词：

accelerometer; fully-differential; 3D; CMOS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study presents a novel inertia sensor design to monolithic integrate x, y, and z-axis accelerometers on a single chip. The chip is implemented using the TSMC 0.35 mu m 2P4M CMOS process, and post metal wet-etching and dielectric dry-etching processes. Thus, the fully-differential capacitance sensing in-plane and out-plane CMOS accelerometers are realized. The measurement results demonstrate the sensitivities for in-plane and out-of-plane accelerometers are 3.9mV/G and 0.9mV/G respectively. The coupling ratios for in-plane and out-plane accelerometer are 3-5% and 15-30%, respectively.

引用

页码：1067 / +

页数：2

共 50 条

[1] New CMOS fully-differential transconductor and application to a fully-differential Gm-C filter
Shaker, MO
Mahmoud, SA
Soliman, AM
[J]. ETRI JOURNAL, 2006, 28 (02) : 175 - 181
[2] Monolithic accelerometer for 3D measurements
Lehtonen, T
Thurau, J
[J]. ADVANCED MICROSYSTEMS FOR AUTOMOTIVE APPLICATIONS 2004, 2004, : 11 - 22
[3] Simulation and measurement of fully-differential CMOS OTAs
Chiang, DHC
Schaumann, R
Daasch, WR
[J]. FREQUENZ, 1997, 51 (3-4) : 85 - 94
[4] A monolithic fully-differential CMOS gas sensor microsystem for microhotplate temperatures up to 450°C
Barrettino, D
Graf, M
Kirstein, K
Hierlemann, A
Baltes, H
[J]. 2004 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL 4, PROCEEDINGS, 2004, : 888 - 891
[5] An integrated fully-differential CMOS-MEMS z-axis accelerometer utilizing a torsional suspension
Qu, Hongwei
Fang, Deyou
Xie, Huikai
[J]. 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2008, : 1063 - 1063
[6] A Bulk-Micromachined Fully-Differential MEMS Accelerometer with Interdigitated Fingers
Aydin, Osman
Akin, Tayfun
[J]. 2012 IEEE SENSORS PROCEEDINGS, 2012, : 158 - 161
[7] Compact Fully-Differential CMOS Current Driver for Bioimpedance Measurements
Corbacho, Israel
Carrillo, Juan M.
Ausin, Jose L.
Dominguez, Miguel A.
Perez-Aloe, Raquel
Duque-Carrillo, J. Francisco
[J]. 2022 29TH IEEE INTERNATIONAL CONFERENCE ON ELECTRONICS, CIRCUITS AND SYSTEMS (IEEE ICECS 2022), 2022,
[8] A CMOS OP AMP WITH FULLY-DIFFERENTIAL GAIN-ENHANCEMENT
LLOYD, J
LEE, HS
[J]. IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-ANALOG AND DIGITAL SIGNAL PROCESSING, 1994, 41 (03): : 241 - 243
[9] CMOS Interface for Capacitive Sensors with Custom Fully-Differential Amplifiers
Jankowski, Mariusz
Zajac, Piotr
Amrozik, Piotr
Szermer, Michal
[J]. PROCEEDINGS OF 2020 27TH INTERNATIONAL CONFERENCE ON MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEM (MIXDES), 2020, : 89 - 93
[10] A Fully-Differential Complementary Hartley VCO in 0.18 μm CMOS Technology
Park, Joonhong
Park, Junyoung
Choi, Youngwan
Sim, Kweebo
Baek, Donghyun
[J]. IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2010, 20 (02) : 91 - 93

← 1 2 3 4 5 →