A study on the machining of high-aspect ratio micro-structures using micro-EDM

Micro-electro-discharge machining (micro-EDM or mu-EDM) has been gaining popularity as a new alternative method to fabricate micro-structures. The main advantages of the micro-EDM method are its low set-up cost, high accuracy and large design freedom. Compared to etching or deposition techniques, micro-EDM has the advantage of being able to fabricate complex three-dimensional shapes with high-aspect ratio. However, there are many operating parameters that affect the micro-EDM process. The fabrication of micro-electrodes on the machine is also an important process to remove the clamping error to maintain high accuracy in the machined micro-structures. In this paper, the machining of micro-structures is divided into two basic processes. One is the on-machine fabrication of the micro-electrodes with high-aspect ratio, and the other is the EDM of the workpiece in micrometer range. An optical sensor has been developed to measure and control the dimension of the thin electrode during the tool fabrication process. Different methods have been investigated to fabricate a thin electrode into the desired dimension without deflection. The performance of the micro-EDM process is evaluated in terms of the material removal rate (MRR), tool wear ratio (TWR), and the stability of the machining. Influences of the various operating parameters of the micro-EDM process, such as the operating voltage, gap control algorithm, and resistance and capacitance values in the R-C spark control circuit, are discussed. (C) 2003 Elsevier B.V. All rights reserved.