STUDY OF MECHANICAL PROPERTIES OF NANOSTRUCTURED POLYMER COATINGS PREPARED USING PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

被引：0
|
作者：
Bursikova, Vilma [1 ]
Homola, Vojtech [1 ]
Perina, Vratislav [2 ]
机构：
[1] Masaryk Univ, Fac Sci, CS-61137 Brno, Czech Republic
[2] Acad Sci Czech Republic, Inst Nucl Phys, CZ-25068 Rez, Czech Republic
来源：
NANOCON 2015: 7TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION | 2015年
关键词：
PECVD; hexamethyldisiloxane; mechanical properties; nanoDMA; PECVD;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/ oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. Complex characterization of the local mechanical properties was carried out on the prepared samples from nano to microscale using indentation techniques. The coatings were very elastic, they exhibited high elastic recovery and low plastic deformation even at indentation depths approaching the coating thickness.
引用
收藏
页码：105 / 110
页数：6
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