Parametric Sensitivity Analysis of a 2-DOF Drive and 1-DOF Sense Modes MEMS Gyro-Accelerometer Structure

被引：5
|
作者：
Verma, Payal [1 ]
Agrawal, Prasha [1 ]
Gopal, R. [1 ]
Arya, Sandeep K. [2 ]
机构：
[1] Cent Elect Engn Res Inst, CSIR, MEMS & Microsensors Grp, Pilani 333031, Rajasthan, India
[2] Guru Jambheshwar Univ Sci & Technol, Dept Elect & Commun Engn, Hisar 125001, Haryana, India
来源：
ADVANCED SCIENCE LETTERS | 2014年 / 20卷 / 7-9期
关键词：
MEMS; Gyroscope; Gyro-Accelerometer; Finite Element Method;
D O I：
10.1166/asl.2014.5557
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
This paper presents the effect of fabrication imperfections and environmental variations on the performance of a 2-DOF drive and 1-DOF sense mode gyro-accelerometer. The effect of variation in the design parameters due to fabrication variations has been investigated and presented. Film stresses which inevitably remain in the fabricated structures have been analysed and their effect on the device dynamics has been presented. Thermal analysis is carried out by subjecting to a uniform temperature loading and the effect by virtue the temperature dependence of material properties has been discussed. Structural and thermal simulations have been performed using CoventorWare (TM) MEMS Design and Analysis software.
引用
收藏
页码：1495 / 1498
页数：4
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