Space charge profile measurement techniques: Recent advances and future directions

被引:76
|
作者
Fleming, RJ [1 ]
机构
[1] Monash Univ, Sch Phys & Mat Engn, Clayton, Vic 3800, Australia
关键词
space charge profiles; spatial resolution; pressure wave propagation; laser induced pressure pulse; pulsed electroacoustic; laser intensity modulation method; conducting atomic force microscopy;
D O I
10.1109/TDEI.2005.1522190
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Some of the advance's in space charge measurement techniques over the last 5 years are described. It is concluded that significant further improvements in spatial resolution are unlikely in the next 5 years, except in the case of the LIMM technique implemented using very short laser pulses, where spatial resolution approaching 100 nm might be achievable. It is suggested that existing space charge techniques be combined with conducting atomic force microscopy (CAFM), with the aim of correlating 3-dimensional space charge profiles and 2-dimensional conductivity maps and thus providing a more complete picture of charge transport through dielectrics, particularly in future work on nanodielectrics. Since CAFM samples are typically 5-10 nm thick, it would be necessary to operate the equipment at higher voltage (say 1000 V) so that samples not less than 10 mu m thick, e.g. polymers, could be investigated. This seems feasible.
引用
收藏
页码:967 / 978
页数:12
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