Current gain of a pulsed DC discharge in low-pressure gases

被引：7

作者：

Lisovskiy, V. A. ^{[1
,2
]}

Ogloblina, P. A. ^{[1
,3
]}

Dudin, S. V. ^{[1
,2
]}

Yegorenkov, V. D. ^{[1
]}

Dakhov, A. N. ^{[1
]}

机构：

[1] Kharkov Natl Univ, 4 Svobody Sq, UA-61022 Kharkov, Ukraine

[2] Sci Ctr Phys Technol, 6 Svobody Sq, UA-61022 Kharkov, Ukraine

[3] Univ Lisbon, Inst Super Tecn, Inst Plasmas & Fusao Nucl, Av Rovisco Pais, P-1049001 Lisbon, Portugal

来源：

VACUUM | 2017年 / 145卷

关键词：

CURRENT ELECTRICAL DISCHARGES; PARALLEL-PLANE ELECTRODES; CAPACITIVELY COUPLED PLASMA; THIN-FILMS TREATMENT; GLOW-DISCHARGE; ENERGY-DISTRIBUTION; NEGATIVE-IONS; BREAKDOWN; OSCILLATIONS; ARGON;

D O I：

10.1016/j.vacuum.2017.08.042

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Current and voltage waveforms of a pulsed discharge have been measured in a wide frequency range (20 -300 kHz) for the two pressure values of 0.1 and 1 Torr using four different technology-relevant gases: nitrogen, oxygen, carbon tetrafluoride and sulfur hexafluoride. It is shown that the current can be substantially increased in the pulsed dc discharge, especially with electronegative gases, as compared with the discharge current relating to the same but constant voltage. The maximum 9-fold current gain is obtained with sulfur hexafluoride. Carbon tetrafluoride furnishes up to 4-fold amplification, while nitrogen and oxygen show the typical current gain of 1-2. Physical mechanism of this phenomenon is discussed. (C) 2017 Elsevier Ltd. All rights reserved.

引用

页码：194 / 202

页数：9

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