Fiber-optic photoacoustic gas sensor with temperature self-compensation

被引：40
|
作者：
Chen, Ke [1 ]
Yang, Beilei [1 ]
Guo, Min [1 ]
Deng, Hong [1 ]
Zhang, Bo [1 ]
Liu, Shuai [1 ]
Li, Chenyang [1 ]
An, Ran [1 ]
Peng, Wei [2 ]
Yu, Qingxu [1 ]
机构：
[1] Dalian Univ Technol, Sch Optoelect Engn & Instrumentat Sci, Dalian 116024, Peoples R China
[2] Dalian Univ Technol, Sch Phys, Dalian 116024, Liaoning, Peoples R China
来源：
OPTICS LETTERS | 2020年 / 45卷 / 08期
基金：
中国国家自然科学基金;
关键词：
Gas detectors - Chemical sensors - Nanocantilevers - Fabry-Perot interferometers - Frequency response;
D O I：
10.1364/OL.390898
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A high-precision fiber-optic photoacoustic (PA) gas sensor with temperature self-compensation is reported. The target gas diffuses into a micro-chamber and absorbs the laser energy to generate a PA signal, which is detected by a Fabry-Perot interferometric cantilever. The temperature affects not only the acoustic sensitivity of the cantilever, but also the PA conversion efficiency. The test result of the PA frequency response demonstrates that there is a temperature-insensitive operating frequency of 1208.4 Hz in the range of 0-80 degrees C. The temperature self-compensated measurement was realized by setting the laser modulation frequency to 604.2 Hz and using the second-harmonic detection technique. (C) 2020 Optical Society of America
引用
收藏
页码：2458 / 2461
页数：4
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