LED broadband spectral ellipsometer with switching of orthogonal polarization states

被引：4

作者：

Kovalev, V. I. ^{[1
]}

Rukovishnikov, A. I. ^{[1
]}

Kovalev, S. V. ^{[1
]}

Kovalev, V. V. ^{[1
]}

机构：

[1] Russian Acad Sci, Fryazino Branch, VA Kotelnikov Inst Radio Engn & Elect, Fryazino, Moscow Oblast, Russia

来源：

JOURNAL OF OPTICAL TECHNOLOGY | 2016年 / 83卷 / 03期

关键词：

SPECTROSCOPIC ELLIPSOMETRY; MODULATION;

D O I：

10.1364/JOT.83.000181

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper describes an LED ellipsometer with a continuous wavelength range of 260-1000 nm and good technical characteristics. The measurement reproducibility and stability of the ellipsometric parameters Psi and Delta of silicon with intrinsic dioxide at the peak wavelengths of the LED radiation are no worse than 0.001 and 0.01 degrees, respectively. At wavelengths of 365, 375, 390, 405, 420, and 465 nm, the reproducibility of the Psi and Delta measurements of metal films is around 0.0003 and 0.001 degrees, respectively. The spectral resolution is 4 nm. The minimum time to measure Psi and Delta in the entire wavelength range is 20 s. (C) 2016 Optical Society of America.

引用

页码：181 / 184

页数：4

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