Dust Particle Growth in a Sputtering Discharge with Krypton

被引：0

作者：

Tawidian, H. ^{[1
]}

Mikikian, M. ^{[1
]}

Lecas, T. ^{[1
]}

Boufendi, L. ^{[1
]}

机构：

[1] Univ Orleans, CNRS, UMR6606, GREMI, F-45067 Orleans 2, France

来源：

DUSTY/COMPLEX PLASMAS: BASIC AND INTERDISCIPLINARY RESEARCH: SIXTH INTERNATIONAL CONFERENCE ON THE PHYSICS OF DUSTY PLASMAS | 2011年 / 1397卷

关键词：

argon; krypton; instabilities; growth kinetics; PLASMAS;

D O I：

10.1063/1.3659847

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Dust particles are grown in the PKE chamber by sputtering materials. The sputtering efficiency and the gas phase reactions can be affected by the gas type and particularly by the ion mass. Due to the presence of growing dust particles, the huge loss of electrons can trigger many instabilities in the plasma. These instabilities, the growth kinetics and the structure of the dust cloud, are compared by using two different gases: argon and krypton.

引用

页数：2

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