Microswitch with mixed piezoelectric and electrostatic actuation

被引：0
|
作者：
Chapuis, F. [1 ]
Defay, E. [2 ]
Casset, F. [2 ]
Manceau, J. F. [3 ]
Bastien, F. [3 ]
Aid, M. [2 ]
机构：
[1] Inst Femto St, Dept LPMO, Besancon, France
[2] CEA LET, Grenoble, France
[3] Institut Femto St, Dept LPMO, Besancon, France
来源：
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年
关键词：
electrostatic; piezoelectric; actuation; microswitch;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this article, a new concept of microswitch is investigated with the objective to decrease the actuation voltage. It consists in a component with two kinds of actuation mechanisms: piezoelectric actuation and electrostatic actuation. The structures were realized with a technology compatible with CMOs technology. Aluminium nitride (AIN) was selected as piezoelectric material for its maturity and integration capabilities.
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页数：2
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