Design and Analysis of MEMS Cantilever for Pyroelectric Energy Conversion using COMSOL Multiphysics

被引：0
|
作者：
Kaveeshwar, Ashwini [1 ]
Swarnalatha, R. [1 ]
Prasad, D. V. [1 ]
Razak, Abdul [1 ]
机构：
[1] BITS Pilani Dubai, Dept EEE, Dubai, U Arab Emirates
来源：
2015 IEEE INTERNATIONAL CONFERENCE ON ELECTRICAL, COMPUTER AND COMMUNICATION TECHNOLOGIES | 2015年
关键词：
Pyroelectric effect; Bimorph Cantilever; MEMS; COMSOLMultiphysics; MATLAB;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
Microelectromechanical Systems (MEMS) has found vast applications in today's world. Many applications in the field of aerospace, biomedicine, laser scanning displays and biomedical imaging systems are realized using MEMS technology. Pyroelectric materials show temperature dependent spontaneous electrical polarization converting thermal energy to electrical energy. In this paper, a self actuating MEMS cantilever for pyroelectric energy conversion is designed using COMSOL Multiphysics software. The energy conversion mechanism and response of a MEMS cantilever with PVDF as pyroelectric material is studied. The base materials used include Silicon Dioxide, Silicon, Aluminum, Polyvinylidine Fluoride (PVDF).
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页数：4
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