Adaptive friction compensation design for submicrometer positioning of high precision stage

被引：0
|
作者：
Minh, Truong Ngoc [1 ]
Ohishi, Kiyoshi [1 ]
Takata, Masasuke [1 ]
Hashimoto, Seiji [2 ]
Kosaka, Kouji [3 ]
Kubota, Hiroshi [4 ]
Ohmi, Tadahiro [5 ]
机构：
[1] Nagaoka Univ Technol, Niigata 9402188, Japan
[2] Gunma Univ, Gunma 3768515, Japan
[3] Tech concierge Kumamoto Inc, Kumamoto 8612202, Japan
[4] Kumamoto Univ, Kumamoto 8608555, Japan
[5] Tohoku Univ, Sendai, Miyagi 9805879, Japan
来源：
2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS | 2007年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper presents an adaptive friction compensation algorithm based on LuGre friction model with only measurements of position for a high precision stage using a synchronous piezoelectric device driver (SPIDER). Two observers are used to estimate an unmeasured friction state in LuGre model. Adaptive control laws are derived on the basis of the Lyapunov technique for estimating unknown friction parameters, and compensating friction force. Lyapunov's direct method is used to prove the robust global convergence of position tracking errors. Experimental results taken from SPIDER system confirm that the proposed control method achieved fine positioning with respect to friction behavior.
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页码：329 / +
页数：2
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