PHYS 57-Nanoimprint lithography, self-perfection by liquefaction, and beyond

被引：0
|
作者：
Chou, Stephen Y. [1 ]
机构：
[1] Princeton Univ, Dept Elect Engn, NanoStruct Lab, Princeton, NJ 08544 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2009年 / 237卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
57-PHYS
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页数：1
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