Achromatic phase-shifting for two-wavelength phase-stepping interferometry

被引:20
|
作者
Hariharan, P
Roy, M
机构
关键词
D O I
10.1016/0030-4018(96)00118-6
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Achromatic phase-shifting can be used with two-wavelength illumination in a polarization interferometer to provide a quick and simple method for profiling surfaces exhibiting steps with heights of a few micrometres.
引用
收藏
页码:220 / 222
页数:3
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