Nanoelectromechanical systems

被引:51
|
作者
Blencowe, MP [1 ]
机构
[1] Dartmouth Coll, Dept Phys & Astron, 6127 Wilder Lab, Hanover, NH 03755 USA
关键词
D O I
10.1080/00107510500146865
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of how classical dynamics arises by approximation to quantum dynamics. This article begins with a survey of NEMS and then describes certain aspects of their classical dynamics. In particular, we show that for weak coupling the action of the electronic device on the mechanical resonator can be effectively that of a thermal bath, this despite the device being a driven, far-from-equilibrium system.
引用
收藏
页码:249 / 264
页数:16
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