Quality factor of torsional resonators in the low-pressure region

被引：46
|
作者：
Kadar, Z
Kindt, W
Bossche, A
Mollinger, J
机构：
[1] Delft University of Technology, Electron. Instrumentation Laboratory, 2600 GA Delft
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 53卷 / 1-3期
关键词：
quality factor; torsional resonators;
D O I：
10.1016/0924-4247(96)80153-1
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports the calculation of the Q-factor of a torsional resonator in the low-pressure region if the vibration occurs in free space or close to another surface. The calculation is based on the model used by Christian but a modified Maxwell-Boltzmann distribution, the Maxwellian-Stream distribution, is applied to describe the velocity distribution of the gas particles colliding with the resonator. The result is an increased damping factor or lower quality, which matches much better with published measurements.
引用
收藏
页码：299 / 303
页数：5
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