TEMPE TURE-DRIFT REJECTION AND SENSITIVITY TO MISMATCH OF SYNCHRONIZED STRONGLY-COUPLED M/NEMS RESONATORS

被引：0

作者：

Prache, Pierre ^{[1
,2
]}

Uranga, Arantxa ^{[2
]}

Barniol, Nuria ^{[2
]}

Juillard, Jerome ^{[1
]}

机构：

[1] UPMC, UPSud, Cent Supelec, GeePs,UMR 8507,CNRS, Gif Sur Yvette, France

[2] Univ Autonoma Barcelona, Dept Elect Engn, E-08193 Barcelona, Spain

来源：

2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2016年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a strongly-coupled resonant architecture in which two M/NEMS resonators are synchronized through their actuation voltage. In the context of a sensing application, this architecture theoretically enables environmental drift rejection (e.g. temperature. humidity) and ultra-sensitive measurement by monitoring a phase difference rather than a frequency. Experiments prove the efficiency of the proposed scheme, with respect to temperature-drift rejection and sensitivity to mismatch.

引用

页码：1054 / 1057

页数：4