c-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna

被引：0
|
作者：
Karasawa, Rei [1 ]
Yanagitani, Takahiko [1 ,2 ,3 ]
机构：
[1] Waseda Univ, Tokyo, Japan
[2] JST PRESTO, Tokyo, Japan
[3] ZAIKEN, Tokyo, Japan
来源：
2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2017年
基金：
日本科学技术振兴机构;
关键词：
ScAlN; shear mode; porarization inverted multilayer films; c-axis tilted films; rectenna;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Enegy harvesting from surrounding electromagnetic wave have attracted much attention in recent years. Low RF-DC conversion efficiency in the rectenna due to a weak power of electromagnetic wave is a problem. We here report the new type of polarization inverted FBAR transformer for RF amplification in the rectenna. c-Axis zig-zag polarization inverted 12 layer ScAlN was fabricated by glancing sputtering deposition. The 12 layer ScAlN HBAR clearly excites 12th-order shear mode of 1.4 dB at 612 MHz. c-Axis tilt angle of the layers was determined to be 40-45 degrees by an XRD pole figure. This new type of device is promising for high efficiency RF-DC conversion in the rectenna.
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页数：4
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