Simultaneous imaging of the topography and dynamic properties of nanomechanical systems by optical beam deflection microscopy

We present an optical microscopy technique based on the scanning of a laser beam across the surface of a sample and the measurement of the deflection of the reflected laser beam in two dimensions. The technique is intended for characterization of nanomechanical systems. It provides the height of a nanomechanical system with sub-nanometer vertical resolution. In addition, it simultaneously provides a complete map of the resonant properties. We demonstrate the capability of the technique by analyzing the residual stress and vibration mode shape of a system consisting of two elastically coupled nanocantilevers. The technique is simple, allows imaging in air, vacuum and liquids, and it is unique in providing synchronized information of the static and dynamic out-of-plane displacement of nanomechanical systems. (c) 2011 American Institute of Physics. [doi:10.1063/1.3561812]