Numerical modeling of RF-RF hybrid plasma torches and parametric study for various geometric, flow and electric configurations

被引：0
|
作者：
Bernardi, D [1 ]
Colombo, V [1 ]
Coppa, GGM [1 ]
Ghedini, E [1 ]
Mentrelli, A [1 ]
机构：
[1] Politecn Torino, Ist Nazl Fis Mat, I-10129 Turin, Italy
来源：
PROGRESS IN PLASMA PROCESSING OF MATERIALS 2001 | 2001年
关键词：
hybrid RF-RF plasma torches; non-conventional coil configurations; numerical simulation; energy efficiency; intermediate gas injection;
D O I：
暂无
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
Two-dimensional (r,z) numerical codes have been developed in order to study RF-RF hybrid plasma torches, both in static and time-dependent conditions. The codes account for the nonconventional configuration of the induction coil and for the presence of a secondary gas injected axially or radially at intermediate positions of the torch. Selected results are presented from a detailed parametric study for various geometric, flow and electric configurations.
引用
收藏
页码：339 / 346
页数：8
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