Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge

被引:92
|
作者
Kozyrev, A. V. [1 ]
Sochugov, N. S. [2 ]
Oskomov, K. V. [2 ]
Zakharov, A. N. [2 ]
Odivanova, A. N. [1 ]
机构
[1] Tomsk VV Kuibyshev State Univ, Tomsk 634050, Russia
[2] Russian Acad Sci, Siberian Branch, Inst High Current Elect, Tomsk 634055, Russia
关键词
POWER DENSITIES;
D O I
10.1134/S1063780X11060122
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Results are presented for experimental studies of the plasma glow in a high-current pulsed magnetron discharge by using a high-speed optical frame camera. It is found that the discharge plasma is inhomogeneous in the azimuthal direction. The plasma bunches rotate with a linear velocity of similar to 1 cm/mu s in the direction of electron Hall drift, and their number is proportional to the discharge current. Plasma inhomogeneities in the form of plasma jets propagate in the form of plasma jets from the cathode region toward the anode. It is shown analytically that the formation of inhomogeneities is caused by the necessity to transfer high-density electron current across the magnetic field.
引用
收藏
页码:621 / 627
页数:7
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