Design and optimization of Sigma-delta accelerometer

被引：0
|
作者：
Chen Song [1 ]
Yang Jian [1 ]
Fan Wenjie [1 ]
Fu Qiang [1 ]
Liu Xiaowei [1 ]
机构：
[1] Harbin Inst Technol, MEMS Ctr, Harbin, Peoples R China
来源：
MICRO-NANO TECHNOLOGY XV | 2014年 / 609-610卷
关键词：
Accelerometer; Sigma-Delta; optimization;
D O I：
10.4028/www.scientific.net/KEM.609-610.1106
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Mathematical model of sensitive structures and detection principle of Sigma-Delta accelerometer are analyzed in this paper, and then an accelerometer with SNR 107dB is designed using MATLAB, the stability of which is analyzed based on root locus plot. When input is small than -3dBFS, the system is unsaturated. The poles and zeros of accelerometer noise transfer function are then analyzed and the feed-forward coefficient and local feedback coefficient are optimized, achieving a higher SNR of 112.1dB. At last, the circuit-level simulation is conducted and in-band noise level is about -140dB.
引用
收藏
页码：1106 / 1110
页数：5
相关论文
共 50 条
  • [1] Design and noise analysis of a sigma-delta capacitive micromachined accelerometer
    刘云涛
    刘晓为
    陈伟平
    吴群
    [J]. Journal of Semiconductors, 2010, 31 (05) : 96 - 101
  • [2] Design and noise analysis of a sigma-delta capacitive micromachined accelerometer
    Liu Yuntao
    Liu Xiaowei
    Chen Weiping
    Wu Qun
    [J]. JOURNAL OF SEMICONDUCTORS, 2010, 31 (05) : 0550061 - 0550066
  • [3] Design Optimization and Simulation of a Fifth-order Sigma-delta Micro-accelerometer System
    Zhang, Meimei
    Quan, Haiyang
    [J]. 2015 8TH INTERNATIONAL CONGRESS ON IMAGE AND SIGNAL PROCESSING (CISP), 2015, : 1333 - 1337
  • [4] System design of second-order sigma-delta micromachined accelerometer
    Xiao, Dingbang
    Wu, Xuezhong
    Li, Shengyi
    [J]. 2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 299 - 302
  • [5] Optimization for Sigma-Delta modulators
    Pneumatikakis, A
    Constantinides, A
    Anastassopoulos, V
    Deliyannis, T
    [J]. DSP 97: 1997 13TH INTERNATIONAL CONFERENCE ON DIGITAL SIGNAL PROCESSING PROCEEDINGS, VOLS 1 AND 2: SPECIAL SESSIONS, 1997, : 661 - 664
  • [6] System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer
    Liu, Xiaowei
    Li, Zhi
    Sun, Guannan
    Liu, Yuntao
    [J]. MEMS/NEMS NANO TECHNOLOGY, 2011, 483 : 219 - 223
  • [7] A digital piezoelectric accelerometer with sigma-delta servo technique
    Spineanu, A
    Benabes, P
    Kielbasa, R
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1997, 60 (1-3) : 127 - 133
  • [8] Digital platform for Sigma-Delta accelerometer assessment and test
    Lima, Vasco
    Brito, Nuno
    Cabral, Jorge
    Monteiro, Joao
    Gaspar, Joao
    Rocha, Luis Alexandre
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 24 (05): : 2265 - 2276
  • [9] Digital platform for Sigma-Delta accelerometer assessment and test
    Vasco Lima
    Nuno Brito
    Jorge Cabral
    João Monteiro
    João Gaspar
    Luis Alexandre Rocha
    [J]. Microsystem Technologies, 2018, 24 : 2265 - 2276
  • [10] Characterization and Optimization of Sigma-Delta ADC
    Trivedi, Preeti
    Verma, Ajay
    Tripathi, Pritish
    [J]. 2012 Third IEEE and IFIP South Central Asian Himalayas Regional International Conference on Internet (AH-ICI 2012), 2012,
12345