Source considerations for low coherence speckle interferometry

被引：4
|
作者：
Balboa, I
Tatam, RP
机构：
来源：
OPTICAL INSPECTION AND MICROMEASUREMENTS II | 1997年 / 3098卷
关键词：
speckle interferometry; low coherence sources; surface profile measurement;
D O I：
10.1117/12.281175
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A range of sources are investigated to determine their suitability for low coherence speckle interferometry (LCSI). Sources include a superluminescent diode (SLD), a multimode laser diode (MMLD) and two MMLDs. The coherence lengths for each are determined using a Michelson interferometer and are then compared with those obtained from a speckle interferometer. Two MMLDs at 792nm and 812nm are found to provide a coherence length of 10.2 mu m comparable with that of the SLD (17 mu m). The dual MMLD source arrangement provides ten to a hundred times greater optical power on the test object making the technique viable for large area test objects.
引用
收藏
页码：316 / 324
页数：9
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