Thickness dependence of electrical properties of PZT films deposited on metal substrates by laser-assisted aerosol deposition

被引:12
|
作者
Baba, So [1 ]
Tsuda, Hiroki [1 ]
Akedo, Jun [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Integrat Proc Technol Grp, Adv Mfg Res Inst, Tsukuba, Ibaraki 3058564, Japan
关键词
D O I
10.1109/TUFFC.2008.747
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Dependence of electrical properties-dielectric, ferroelectric, and piezoelectric properties-on film thickness was studied for lead-zirconate-titanate (PZT) thick films directly deposited onto stainless-steel (SUS) substrates in actuator devices by using a carbon dioxide (CO2), laser-assisted aerosol deposition technique. Optical spectroscopic analysis data and laser irradiation experiments revealed that absorption at a given wavelength by the film increased with increasing film thickness. Dielectric constant C, remanent polarization value P,, and coercive field strength Ec of PZT films directly deposited onto a SUS-based piezoelectric actuator substrate annealed by CO2 laser irradiation at 850 degrees C improved with increasing film thickness, and for films thicker than 25 mu m, epsilon > 800, P-r > 40 mu C/cm(2), and E-c < 45 kV/cm. In contrast, the displacement of the SUS-based actuator with the laser-annealed PZT thick film decreased with increasing film thickness.
引用
收藏
页码:1009 / 1016
页数:8
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