Small is beautiful

被引：5
|
作者：
Venables, M
机构：
来源：
IEE REVIEW | 2005年 / 51卷 / 03期
关键词：
D O I：
10.1049/ir:20050301
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Japan initiated the Highly Agile Line Concept Advancement (HALCA) project to prop up its ailing semiconductor industry. Under this £8bn project, key innovations include energy and time-saving multi-process tools with balanced processes and fast e-beam techniques that are creating attractive and disruptive opportunities for semiconductor components and system production. Chips produced under the HALCA minifab are as good as those produced in mainstream fabrication facility and can be produced on a much shorter cycle time, with energy savings of 60%.
引用
收藏
页码：26 / 27
页数：2
相关论文
共 50 条
  • [1] Small is beautiful, big is beautiful
    不详
    [J]. BRENNSTOFF-WARME-KRAFT, 1999, 51 (11-12): : 34 - 34
  • [2] SMALL IS BEAUTIFUL
    HEADLAND, ATP
    [J]. INDUSTRIAL DISTRIBUTION, 1977, 67 (05): : 31 - 31
  • [3] Small is beautiful
    不详
    [J]. COMPUTER-AIDED ENGINEERING, 1996, 15 (05): : 12 - 12
  • [4] SMALL IS NOT BEAUTIFUL
    RUSTIN, B
    [J]. ACROSS THE BOARD, 1977, 14 (10): : 2 - &
  • [5] Is small beautiful?
    Shinnors, A
    [J]. IRISH VETERINARY JOURNAL, 1997, 50 (07) : 410 - +
  • [6] SMALL IS BEAUTIFUL
    MAHER, M
    [J]. DATAMATION, 1991, 37 (16): : 12 - 12
  • [7] Small Is Beautiful
    Foundas, Scott
    [J]. FILM COMMENT, 2011, 47 (06) : 22 - 27
  • [8] Small is beautiful
    不详
    [J]. PROFESSIONAL ENGINEERING, 2008, 21 (06) : 29 - 29
  • [9] Small is beautiful
    Moffat, Keith
    [J]. NATURE METHODS, 2012, 9 (03) : 242 - 243
  • [10] Small is beautiful
    Farrell, L
    [J]. BRITISH MEDICAL JOURNAL, 1997, 314 (7084): : 909 - 909
12345